Monolithic ultra-high-Q lithium niobate microring resonator
نویسندگان
چکیده
MIAN ZHANG, CHENG WANG, REBECCA CHENG, AMIRHASSAN SHAMS-ANSARI, AND MARKO LONČAR* John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA Department of Physics, Brown University, Providence, Rhode Island 02912, USA Department of Electrical Engineering and Computer Science, Howard University, Washington, DC 20059, USA *Corresponding author: [email protected]
منابع مشابه
Electro-optically tunable microring resonators on lithium niobate.
Electro-optical tuning of a microring resonator fabricated on lithium niobate (LiNbO3) is presented. The device structure, including microring resonator and couplers, is designed in detail and is produced by titanium diffusion on the wet-etched LiNbO3 ridge surface. The resonance wavelengths for TM and TE polarizations can be tuned by electro-optic effect. The output characteristics of through ...
متن کاملFabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables ...
متن کاملMonolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integra...
متن کاملFree-standing high quality factor thin-film lithium niobate micro-photonic disk resonators
Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have promising prospects in many applications including high efficiency electro-optic modulators, optomechanics and nonlinear optics. This paper presents free-standing thin-film lithium niobate photonic resonators on a silicon platform using MEMS fabrication technology. We fabricated a 35um radius niobate disk resonator th...
متن کاملHigh-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation.
Lithium niobate (LN) microdisk resonators on a LN-silica-LN chip were fabricated using only conventional semiconductor fabrication processes. The quality factor of the LN resonator with a 39.6-μm radius and a 0.5-μm thickness is up to 1.19 × 10(6), which doubles the record of the quality factor 4.84 × 10(5) of LN resonators produced by microfabrication methods allowing batch production. Electro...
متن کامل